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Published in Journal of Advanced Mechanical Design, Systems, and Manufacturing (01.01.2009)
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Journal Article
CMP process run-to-run control to adjust margin in control limit
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Published in Precision engineering (2011)
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Year of Publication 30.10.2002
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POWER SUPPLY HAVING IMPROVED POWER FACTOR
AONUMA, KENICHI, MAEYAMA, SHIGETAKA, HIRAYAMA, HIROMITSU, ABE, HISAHIKO
Year of Publication 14.03.1996
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Year of Publication 14.03.1996
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NAKAJIMA TOSHIHIRO, TACHIKAWA KOSAKU, MORISAWA TOSHIHIRO, ABE HISAHIKO
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Year of Publication 04.07.2006
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Method of polishing semiconductor wafer
Morisawa, Toshihiro, Abe, Hisahiko, Tachikawa, Kosaku, Nakajima, Toshihiro
Year of Publication 04.07.2006
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Year of Publication 04.07.2006
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Fabrication method of semiconductor integrated circuit device
ABE HISAHIKO, TSUCHIYAMA HIROFUMI, NISHIGUCHI TAKASHI, HIYAMA MASAKI, NAKABAYSHI SHINICHI
Year of Publication 27.12.2005
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Year of Publication 27.12.2005
Patent
Fabrication method of semiconductor integrated circuit device
Nakabayshi, Shinichi, Abe, Hisahiko, Tsuchiyama, Hirofumi, Hiyama, Masaki, Nishiguchi, Takashi
Year of Publication 27.12.2005
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Year of Publication 27.12.2005
Patent
Method of polishing semiconductor wafer
NAKAJIMA TOSHIHIRO, TACHIKAWA KOSAKU, MORISAWA TOSHIHIRO, ABE HISAHIKO
Year of Publication 03.11.2005
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Year of Publication 03.11.2005
Patent
Fabrication method of semiconductor integrated circuit device
Abe, Hisahiko, Nakabayshi, Shinichi, Tsuchiyama, Hirofumi, Hiyama, Masaki, Nishiguchi, Takashi
Year of Publication 09.12.2004
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Year of Publication 09.12.2004
Patent
Fabrication method of semiconductor integrated circuit device
ABE HISAHIKO, TSUCHIYAMA HIROFUMI, NISHIGUCHI TAKASHI, HIYAMA MASAKI, NAKABAYSHI SHINICHI
Year of Publication 09.12.2004
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Year of Publication 09.12.2004
Patent
Fabrication method of semiconductor integrated circuit device
ABE HISAHIKO, TSUCHIYAMA HIROFUMI, NISHIGUCHI TAKASHI, HIYAMA MASAKI, NAKABAYSHI SHINICHI
Year of Publication 24.10.2002
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Year of Publication 24.10.2002
Patent
Fabrication method of semiconductor integrated circuit device
Abe, Hisahiko, Nakabayshi, Shinichi, Tsuchiyama, Hirofumi, Hiyama, Masaki, Nishiguchi, Takashi
Year of Publication 24.10.2002
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Year of Publication 24.10.2002
Patent