Search Results - "ABDUL AZIZ KHAJA" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

METHODS OF MINIMIZING WAFER BACKSIDE DAMAGE IN SEMICONDUCTOR WAFER PROCESSING

METHODS OF MINIMIZING WAFER BACKSIDE DAMAGE IN SEMICONDUCTOR WAFER PROCESSING

by GANESH BALASUBRAMANIAN, HU LIANGFA, ABDUL AZIZ KHAJA, SUDHA S RATHI
Year of Publication 30.07.2024

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Patent

RF GROUNDING CONFIGURATION FOR PEDESTALS

RF GROUNDING CONFIGURATION FOR PEDESTALS

by VINAY K PRABHAKAR, VIREN KALSEKAR, EDWARD P HAMMOND IV, SATYA THOKACHICHU, YE ZHENG JOHN, ABDUL AZIZ KHAJA
Year of Publication 27.03.2024

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Patent

HIGH TEMPERATURE ELECTROSTATIC CHUCK

HIGH TEMPERATURE ELECTROSTATIC CHUCK

by WOO HYUNG JE, WU FEI, LI JIAN, MA JUN, ABDUL AZIZ KHAJA
Year of Publication 23.01.2020

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Patent

REMOTE PLASMA SOURCE FOR CONTROLLING PLASMA SKEW

REMOTE PLASMA SOURCE FOR CONTROLLING PLASMA SKEW

by JAY D PINSON II, JUAN CARLOS ROCHA-ALVAREZ, AYOUB MOHAMAD, ABDUL AZIZ KHAJA, RAMESH BOKKA
Year of Publication 17.11.2016

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Patent

BEVEL PEELING AND DEFECTIVITY SOLUTION FOR SUBSTRATE PROCESSING

BEVEL PEELING AND DEFECTIVITY SOLUTION FOR SUBSTRATE PROCESSING

by KHAJA, Abdul Aziz
Year of Publication 30.12.2021

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Patent

BEVEL PEELING AND DEFECTIVITY SOLUTION FOR SUBSTRATE PROCESSING

BEVEL PEELING AND DEFECTIVITY SOLUTION FOR SUBSTRATE PROCESSING

by KHAJA, Abdul Aziz
Year of Publication 19.11.2020

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Patent

BEVEL PEELING AND DEFECTIVITY SOLUTION FOR SUBSTRATE PROCESSING

BEVEL PEELING AND DEFECTIVITY SOLUTION FOR SUBSTRATE PROCESSING

by KHAJA, Abdul Aziz
Year of Publication 19.11.2020

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Patent

METHODS AND MECHANISMS FOR ADJUSTING CHUCKING VOLTAGE DURING SUBSTRATE MANUFACTURING

METHODS AND MECHANISMS FOR ADJUSTING CHUCKING VOLTAGE DURING SUBSTRATE MANUFACTURING

by KHAJA, Abdul Aziz, SANGHVI, Mitesh, SHANKARAMURTHY, Venkatanarayana
Year of Publication 01.02.2024

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Patent

METHODS AND MECHANISMS FOR ADJUSTING CHUCKING VOLTAGE DURING SUBSTRATE MANUFACTURING

METHODS AND MECHANISMS FOR ADJUSTING CHUCKING VOLTAGE DURING SUBSTRATE MANUFACTURING

by Khaja, Abdul Aziz, Shankarmurthy, Venkatanarayana, Sanghvi, Mitesh
Year of Publication 01.02.2024

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Patent

Self-healing semiconductor wafer processing

Self-healing semiconductor wafer processing

by Khaja, Abdul Aziz
Year of Publication 20.10.2020

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Patent

RADIO FREQUENCY SOURCE FOR INDUCTIVELY COUPLED AND CAPACITIVELY COUPLED PLASMAS IN SUBSTRATE PROCESSING CHAMBERS

RADIO FREQUENCY SOURCE FOR INDUCTIVELY COUPLED AND CAPACITIVELY COUPLED PLASMAS IN SUBSTRATE PROCESSING CHAMBERS

by Khaja, Abdul Aziz, Rocha-Alvarez, Juan Carlos
Year of Publication 05.10.2023

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Patent

PIXELATED SHOWERHEAD FOR RF SENSITIVE PROCESSES

PIXELATED SHOWERHEAD FOR RF SENSITIVE PROCESSES

by Khaja, Abdul Aziz, Rocha-Alvarez, Juan Carlos
Year of Publication 28.09.2023

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Patent

RADIO FREQUENCY SOURCE FOR INDUCTIVELY COUPLED AND CAPACITIVELY COUPLED PLASMAS IN SUBSTRATE PROCESSING CHAMBERS

RADIO FREQUENCY SOURCE FOR INDUCTIVELY COUPLED AND CAPACITIVELY COUPLED PLASMAS IN SUBSTRATE PROCESSING CHAMBERS

by KHAJA, Abdul Aziz, ROCHA-ALVAREZ, Juan Carlos
Year of Publication 21.09.2023

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Patent

SYSTEMS AND METHODS FOR DEPOSITION RESIDUE CONTROL

SYSTEMS AND METHODS FOR DEPOSITION RESIDUE CONTROL

by KHAJA, Abdul Aziz, PATEL, Anjana M
Year of Publication 02.06.2022

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Patent

SYSTEMS AND METHODS FOR DEPOSITION RESIDUE CONTROL

SYSTEMS AND METHODS FOR DEPOSITION RESIDUE CONTROL

by Khaja, Abdul Aziz, Patel, Anjana M
Year of Publication 26.05.2022

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Patent

Clean processes for boron carbon film deposition

Clean processes for boron carbon film deposition

by Khaja, Abdul Aziz, Zhao, Jiheng, Kulshreshtha, Prashant Kumar, Ruan, Fang
Year of Publication 28.03.2023

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Patent

SELF-HEALING SEMICONDUCTOR WAFER PROCESSING

SELF-HEALING SEMICONDUCTOR WAFER PROCESSING

by KHAJA Abdul Aziz
Year of Publication 01.03.2018

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Patent

SELF-HEALING SEMICONDUCTOR WAFER PROCESSING

SELF-HEALING SEMICONDUCTOR WAFER PROCESSING

by KHAJA, Abdul Aziz
Year of Publication 01.03.2018

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Patent

Heater support kit for bevel etch chamber

Heater support kit for bevel etch chamber

by Khaja, Abdul Aziz, Lee, Jeongmin, Nguyen, Tuan Anh, Patel, Anjana M
Year of Publication 02.04.2024

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Patent

Treatments for controlling deposition defects

Treatments for controlling deposition defects

by Khaja, Abdul Aziz, Balasubramanian, Ganesh, Tailor, Hiral D, Rajagopalan, Nagarajan, Rathi, Sudha S, Para, Prashanthi
Year of Publication 06.02.2024

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Patent

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