CLEAN PROCESSES FOR BORON CARBON FILM DEPOSITION
Khaja, Abdul Aziz, Zhao, Jiheng, Kulshreshtha, Prashant Kumar, Ruan, Fang
Year of Publication 28.04.2022
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Year of Publication 28.04.2022
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Process chamber with reduced plasma arc
Khaja, Abdul Aziz, Prabhakar, Vinay K, Balasubramanian, Ganesh, Ha, Sungwon, Wu, Fei
Year of Publication 16.01.2024
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Year of Publication 16.01.2024
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METHODS AND APPARATUS FOR MINIMIZING SUBSTRATE BACKSIDE DAMAGE
KHAJA, Abdul Aziz, SUZUKI, Yoichi, BOBEK, Sarah Michelle, KULSHRESHTHA, Prashant Kumar, HU, Liangfa
Year of Publication 30.11.2023
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Year of Publication 30.11.2023
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CHAMBER CONFIGURATIONS AND PROCESSES FOR PARTICLE CONTROL
Khaja, Abdul Aziz, Prabhakar, Vinay, Balasubramanian, Ganesh, Ha, Sungwon, Wu, Fei
Year of Publication 21.09.2023
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Year of Publication 21.09.2023
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Methods and apparatus for minimizing substrate backside damage
Khaja, Abdul Aziz, Bobek, Sarah Michelle, Kulshreshtha, Prashant Kumar, Suzuki, Yoichi, Hu, Liangfa
Year of Publication 12.09.2023
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Year of Publication 12.09.2023
Patent
METHOD OF IN SITU CERAMIC COATING DEPOSITION
KHAJA, Abdul Aziz, LIMDULPAIBOON, Ratsamee, BOBEK, Sarah Michelle, LEE, Kwangduk Douglas
Year of Publication 31.08.2023
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Year of Publication 31.08.2023
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Method of in situ ceramic coating deposition
Khaja, Abdul Aziz, Bobek, Sarah Michelle, Limdulpaiboon, Ratsamee, Lee, Kwangduk Douglas
Year of Publication 13.06.2023
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Year of Publication 13.06.2023
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Chamber configurations and processes for particle control
Khaja, Abdul Aziz, Prabhakar, Vinay, Balasubramanian, Ganesh, Ha, Sungwon, Wu, Fei
Year of Publication 06.06.2023
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Year of Publication 06.06.2023
Patent
TREATMENTS FOR CONTROLLING DEPOSITION DEFECTS
Khaja, Abdul Aziz, Balasubramanian, Ganesh, Tailor, Hiral D, Rajagopalan, Nagarajan, Rathi, Sudha S, Para, Prashanthi
Year of Publication 02.03.2023
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Year of Publication 02.03.2023
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UNIFORM IN SITU CLEANING AND DEPOSITION
Ramamurthi, Badri N, Khaja, Abdul Aziz, Bobek, Sarah Michelle, Zhang, Yuxing, Rathi, Saket, Pathak, Nitin, Nguyen, Tuan A, Bansal, Amit
Year of Publication 14.12.2023
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Year of Publication 14.12.2023
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SIDE PUMPING CHAMBER AND DOWNSTREAM RESIDUE MANAGEMENT HARDWARE
Ge, Zaoyuan, Khaja, Abdul Aziz, Ramamurthi, Badri N, Bobek, Sarah Michelle, Bansal, Amit, Ha, Sungwon, Xiong, Yin, Kulkarni, Ajit Laxman, Poomani, Prasath
Year of Publication 24.10.2024
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Year of Publication 24.10.2024
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SIDE PUMPING CHAMBER AND DOWNSTREAM RESIDUE MANAGEMENT HARDWARE
RAMAMURTHI, Badri N, POOMANI, Prasath, KHAJA, Abdul Aziz, GE, Zaoyuan, KULKARNI, Ajit Laxman, HA, Sungwon, XIONG, Yin, BOBEK, Sarah Michelle, BANSAL, Amit
Year of Publication 24.10.2024
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Year of Publication 24.10.2024
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Methods of minimizing wafer backside damage in semiconductor wafer processing
Khaja, Abdul Aziz, Balasubramanian, Ganesh, Rathi, Sudha S, Hu, Liangfa
Year of Publication 06.04.2021
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Year of Publication 06.04.2021
Patent
Hardmask tuning by electrode adjustment
Khaja, Abdul Aziz, Xia, Li-Qun, Tsiang, Michael Wenyoung, Cheng, Yayun, Hsiao, Kevin, Hu, Liangfa
Year of Publication 29.11.2022
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Year of Publication 29.11.2022
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Uniform in situ cleaning and deposition
Ramamurthi, Badri N, Khaja, Abdul Aziz, Bobek, Sarah Michelle, Zhang, Yuxing, Rathi, Saket, Pathak, Nitin, Nguyen, Tuan A, Bansal, Amit
Year of Publication 29.08.2023
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Year of Publication 29.08.2023
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