COATINGS FOR ENHANCEMENT OF PROPERTIES AND PERFORMANCE OF SUBSTRATE ARTICLES AND APPARATUS
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Year of Publication 04.04.2019
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COATINGS FOR ENHANCEMENT OF PROPERTIES AND PERFORMANCE OF SUBSTRATE ARTICLES AND APPARATUS
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COATINGS FOR ENHANCEMENT OF PROPERTIES AND PERFORMANCE OF SUBSTRATE ARTICLES AND APPARATUS
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High conductivity electrostatic chuck
Stone Lyudmila, Cooke Richard A, Suuronen David, Blake Julian, Donnell Steven, Venkatraman Chandra, Stone Dale K
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COATINGS FOR ENHANCEMENT OF PROPERTIES AND PERFORMANCE OF SUBSTRATE ARTICLES AND APPARATUS
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COATINGS FOR ENHANCEMENT OF PROPERTIES AND PERFORMANCE OF SUBSTRATE ARTICLES AND APPARATUS
COOKE, Richard, A, GUNDA, Nilesh, LIN, I-Kuan, PETERS, David, W, LI, Weimin, HENDRIX, Bryan, C, WALDFRIED, Carlo
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Year of Publication 20.12.2017
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Year of Publication 14.12.2016
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Electrostatic Chuck and Method of Making Same
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Year of Publication 17.11.2016
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COATINGS FOR ENHANCEMENT OF PROPERTIES AND PERFORMANCE OF SUBSTRATE ARTICLES AND APPARATUS
COOKE, Richard, A, GUNDA, Nilesh, LIN, I-Kuan, PETERS, David, W, LI, Weimin, HENDRIX, Bryan, C, WALDFRIED, Carlo
Year of Publication 28.09.2017
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Year of Publication 28.09.2017
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