Nanosheet Count Optimization Strategy of Complementary FET (CFET) Scaling Beyond 2 nm From Device to Circuit
He, Hao, Li, Shixin, Luo, Yanna, Xu, Haoqing, Yin, Huaxiang, Wu, Zhenhua
Published in 2023 International Workshop on Advanced Patterning Solutions (IWAPS) (26.10.2023)
Published in 2023 International Workshop on Advanced Patterning Solutions (IWAPS) (26.10.2023)
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Conference Proceeding
Lithographic Stepping Trajectory Planning for Residual Vibration Suppression: An Asymmetric S-Curve Method
Dong, Yue, Wan, Yu, Song, Shuo, Li, Li
Published in 2023 International Workshop on Advanced Patterning Solutions (IWAPS) (26.10.2023)
Published in 2023 International Workshop on Advanced Patterning Solutions (IWAPS) (26.10.2023)
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Conference Proceeding
Metrology Evaluation Indicators of Gate Line End Patterning of SRAM by Using SEM Contour Extraction
Wang, Rui, Ren, Kun, Gao, Dawei, Wu, Yongyu, Li, Xiaoci, Wan, Qijian, Zou, Sihang, Du, Chunshan
Published in 2023 International Workshop on Advanced Patterning Solutions (IWAPS) (26.10.2023)
Published in 2023 International Workshop on Advanced Patterning Solutions (IWAPS) (26.10.2023)
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Conference Proceeding
Pix2PixHD-Based Generation of SEM Image in the ETCH Domain by SEM Image of LITHO Domain
Zhao, Botong, Shen, Jiwei, Lu, Hu, Lou, Pengjie, Zhou, Wenzhan, Zhou, Kan, Zhao, Xintong, Lyu, Shujing, Lu, Yue
Published in 2023 International Workshop on Advanced Patterning Solutions (IWAPS) (26.10.2023)
Published in 2023 International Workshop on Advanced Patterning Solutions (IWAPS) (26.10.2023)
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Conference Proceeding
A Curvilinear OPC Workflow for Highly Repetitive Structures and High Aspect Ratio Patterns
Gao, Xing, Chen, Ken, Li, Xiaomeng, Zhao, Xuan, Kim, Keeho, Zhang, Xima, Zhu, Cynthia
Published in 2023 International Workshop on Advanced Patterning Solutions (IWAPS) (26.10.2023)
Published in 2023 International Workshop on Advanced Patterning Solutions (IWAPS) (26.10.2023)
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Conference Proceeding
Contact Hole Multiplication by Directed Self-Assembly of Block Copolymer with Homopolymer-Blending
Wu, Zhiyong, Dong, Qingshu, Luo, Jiacheng, Yuan, Kangrui, Li, Zili, Liu, Yadong, Ji, Shengxiang, Li, Weihua, Zhang, Yan, Xiong, Shisheng
Published in 2023 International Workshop on Advanced Patterning Solutions (IWAPS) (26.10.2023)
Published in 2023 International Workshop on Advanced Patterning Solutions (IWAPS) (26.10.2023)
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Conference Proceeding
A Rigorous-Simulation-Driven OPC Solution Was Built Before Obtaining Real Wafer Data
Meng, Xiaodong, Chen, Cai, Li, Edward, Chen, Lei, Wang, Zilong, Zhu, Liang
Published in 2023 International Workshop on Advanced Patterning Solutions (IWAPS) (26.10.2023)
Published in 2023 International Workshop on Advanced Patterning Solutions (IWAPS) (26.10.2023)
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Conference Proceeding
Rigorous Simulation for Impact of Self-Aligned Multiple Patterning on Alignment
Yao, Mingyi, Qi, Yuejing, Zhou, Guangying, Li, Liang, Jiang, Miao, Shi, Elly
Published in 2023 International Workshop on Advanced Patterning Solutions (IWAPS) (26.10.2023)
Published in 2023 International Workshop on Advanced Patterning Solutions (IWAPS) (26.10.2023)
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Conference Proceeding
Solutions to Calibration Errors of OPC Models for Special Pattern Below 40 NM Nodes
Wang, Kang, Luo, ZhaoLong, Lv, Pan
Published in 2023 International Workshop on Advanced Patterning Solutions (IWAPS) (26.10.2023)
Published in 2023 International Workshop on Advanced Patterning Solutions (IWAPS) (26.10.2023)
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Conference Proceeding
Ultra-thin Film Metrology Technique: Grazing Incident X-Ray Fluorescence
Feng, Yinqiao, Huang, Yuxiang, Luo, Ronghui, Chen, Zhijun, Li, Xujun, Wong, Trina, Fan, Qiang, Hong, Feng, Chang, Athena
Published in 2023 International Workshop on Advanced Patterning Solutions (IWAPS) (26.10.2023)
Published in 2023 International Workshop on Advanced Patterning Solutions (IWAPS) (26.10.2023)
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Conference Proceeding
Exploration charge effect and wafer backside materials correlation to Diamond-Like Carbon wafer table degradation
Song, Zhaojie, Ding, Kai, Hu, Shancheng, Zhao, Stone, Zhang, Leslie, Jiang, Shifeng
Published in 2023 International Workshop on Advanced Patterning Solutions (IWAPS) (26.10.2023)
Published in 2023 International Workshop on Advanced Patterning Solutions (IWAPS) (26.10.2023)
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Conference Proceeding
Investigation of Multiple Feedforward Modes for On Product Overlay Control
Zhang, Chi, Bao, Yongcun, Liu, Guoping, Lin, Guanqiang, Li, Chongxing, Zhao, Hongwen
Published in 2023 International Workshop on Advanced Patterning Solutions (IWAPS) (26.10.2023)
Published in 2023 International Workshop on Advanced Patterning Solutions (IWAPS) (26.10.2023)
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Conference Proceeding
The Rational Photomask Layout Design of Vias for Application in Double Patterning UV Photolithography
Dou, Mei, Xu, Xiaobin, Xiong, Shisheng
Published in 2023 International Workshop on Advanced Patterning Solutions (IWAPS) (26.10.2023)
Published in 2023 International Workshop on Advanced Patterning Solutions (IWAPS) (26.10.2023)
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Conference Proceeding
Selecting test patterns with the pool-based sampling method
Xu, Peng, Wei, Juan, Liu, Jinlai, Qin, Jingkang, Sun, Song, Cao, Qingchen, Shi, Jiangliu
Published in 2023 International Workshop on Advanced Patterning Solutions (IWAPS) (26.10.2023)
Published in 2023 International Workshop on Advanced Patterning Solutions (IWAPS) (26.10.2023)
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Conference Proceeding
The Ultimate Step to Predict Yield Impact from Mask by Litho Printability Review
Lo, Ching Shu, Yu, Da Quan, Ren, Maohua, Chang, Chin Kuei
Published in 2023 International Workshop on Advanced Patterning Solutions (IWAPS) (26.10.2023)
Published in 2023 International Workshop on Advanced Patterning Solutions (IWAPS) (26.10.2023)
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Conference Proceeding
Application of Genetic Algorithm to Solving Better SRAF Rules
Li, Xuan, Ren, Kun, Gao, Dawei, Wu, Yongyu, Pang, Bo, Zou, Sihang, Tian, Zhenguo
Published in 2023 International Workshop on Advanced Patterning Solutions (IWAPS) (26.10.2023)
Published in 2023 International Workshop on Advanced Patterning Solutions (IWAPS) (26.10.2023)
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Conference Proceeding
Extending DRSEM Inspection Capacities and Applications with the Introduction of D2DB Technology
Yu, Hao, Yan, Changlian, Zhang, Rongjia, Gan, Yuan, Ding, Nuo, Ding, Ming, Chen, Zhao, Luo, Xiaojun, Jiang, Junhai, Yu, Zongchang, Han, Chunying
Published in 2023 International Workshop on Advanced Patterning Solutions (IWAPS) (26.10.2023)
Published in 2023 International Workshop on Advanced Patterning Solutions (IWAPS) (26.10.2023)
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Conference Proceeding
BOE-ziSIM: A Design-Technology-Manufacturing Co-optimization Platform
Liu, Nan, Zhang, Zhizhao, Chen, Shantao, Dong, Lisong, Wang, Hong
Published in 2023 International Workshop on Advanced Patterning Solutions (IWAPS) (26.10.2023)
Published in 2023 International Workshop on Advanced Patterning Solutions (IWAPS) (26.10.2023)
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Conference Proceeding