A tool portfolio planning methodology for semiconductor wafer fabs
Chung-En Kao, Y-C Chou
Published in 2000 Semiconductor Manufacturing Technology Workshop (Cat. No.00EX406) (2000)
Published in 2000 Semiconductor Manufacturing Technology Workshop (Cat. No.00EX406) (2000)
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Conference Proceeding
Dynamic scheduling rule selection for fab operations
Bo-Wei Hsieh, Shi-Chung Chang, Chun-Hung Chen
Published in 2000 Semiconductor Manufacturing Technology Workshop (Cat. No.00EX406) (2000)
Published in 2000 Semiconductor Manufacturing Technology Workshop (Cat. No.00EX406) (2000)
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Conference Proceeding
SHEWMAC: an end-of-line SPC scheme via exponentially weighted moving statistics
Chih-Min Fan, Shi-Chung Chang, Ruey-Shan Guo, Hui-Hung Kung, Jyh-Cheng You, Hsin-Pai Chen, Lin, S., Chih-Shih Wei
Published in 2000 Semiconductor Manufacturing Technology Workshop (Cat. No.00EX406) (2000)
Published in 2000 Semiconductor Manufacturing Technology Workshop (Cat. No.00EX406) (2000)
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Conference Proceeding
Technical and Business Issues of 300mm Inplementation
Goodall, R.
Published in 2000 Semiconductor Manufacturing Technology Workshop (Cat. No.00EX406) (2000)
Published in 2000 Semiconductor Manufacturing Technology Workshop (Cat. No.00EX406) (2000)
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Conference Proceeding
Operation management interface for foundry operation users
Chien-Chung Huang, Yu-Fong Huang, Chu, J., Chen, T.
Published in 2000 Semiconductor Manufacturing Technology Workshop (Cat. No.00EX406) (2000)
Published in 2000 Semiconductor Manufacturing Technology Workshop (Cat. No.00EX406) (2000)
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Conference Proceeding
CMP area automation in SMIF fab
Yuh-Dean Tsai, Hwa-Shin Huang
Published in 2000 Semiconductor Manufacturing Technology Workshop (Cat. No.00EX406) (2000)
Published in 2000 Semiconductor Manufacturing Technology Workshop (Cat. No.00EX406) (2000)
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Conference Proceeding
DRAM Production Strategy in Taiwan
Chen, M.L.
Published in 2000 Semiconductor Manufacturing Technology Workshop (Cat. No.00EX406) (2000)
Published in 2000 Semiconductor Manufacturing Technology Workshop (Cat. No.00EX406) (2000)
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Conference Proceeding
Global ESH cooperation & Technical Advances
Duffin, B.
Published in 2000 Semiconductor Manufacturing Technology Workshop (Cat. No.00EX406) (2000)
Published in 2000 Semiconductor Manufacturing Technology Workshop (Cat. No.00EX406) (2000)
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Conference Proceeding