by Liang, V., Bothra, S., Sur, H., Sengupta, S.
Published in 1998 3rd International Symposium on Plasma Process-Induced Damage (Cat. No.98EX100) (1998)

by Bang, D.S., Hao, M.Y., Chen, S., Xiang, Q., Yeap, G., Lin, M.R.
Published in 1998 3rd International Symposium on Plasma Process-Induced Damage (Cat. No.98EX100) (1998)

by Lee, H.C., Creusen, M., Groeseneken, G., Vanhaelemeersch, S.
Published in 1998 3rd International Symposium on Plasma Process-Induced Damage (Cat. No.98EX100) (1998)

by Noguchi, K., Ohtake, H., Samukawa, S., Horiuchi, T.
Published in 1998 3rd International Symposium on Plasma Process-Induced Damage (Cat. No.98EX100) (1998)

by Sheu, B.-R., Wu, K.-H., Lin, G.-L., Jeng, E.
Published in 1998 3rd International Symposium on Plasma Process-Induced Damage (Cat. No.98EX100) (1998)

by Gill, C., Porter, J., McEntarfer, P.
Published in 1998 3rd International Symposium on Plasma Process-Induced Damage (Cat. No.98EX100) (1998)

by Tokashiki, K., Araki, M., Nagase, M., Noguchi, K., Miyamoto, H., Horiuchi, T.
Published in 1998 3rd International Symposium on Plasma Process-Induced Damage (Cat. No.98EX100) (1998)

by Hasegawa, A., Shimpuku, F., Aoyama, M., Hashimoto, K., Nakamura, M.
Published in 1998 3rd International Symposium on Plasma Process-Induced Damage (Cat. No.98EX100) (1998)

by Cheung, K.P., Liu, C.-T., Chang, C.-P., Colonell, J.I., Lai, W.-Y.-C., Pai, C.-S., Vaidya, H., Liu, R., Clemens, J.T., Hasegawa, E.
Published in 1998 3rd International Symposium on Plasma Process-Induced Damage (Cat. No.98EX100) (1998)

by Luchies, J.-M., Simon, P., Kuper, F., Maly, W.
Published in 1998 3rd International Symposium on Plasma Process-Induced Damage (Cat. No.98EX100) (1998)

by Brozek, T., Dao, T.
Published in 1998 3rd International Symposium on Plasma Process-Induced Damage (Cat. No.98EX100) (1998)

by Benbrik, J., Perdu, P., Benteo, B., Desplats, S., Labat, N., Touboul, A., Danto, Y.
Published in 1998 3rd International Symposium on Plasma Process-Induced Damage (Cat. No.98EX100) (1998)

by Linder, B.P., Cheung, N.W.
Published in 1998 3rd International Symposium on Plasma Process-Induced Damage (Cat. No.98EX100) (1998)

by Creusen, M., Lee, H.-C., Vanhaelemeersch, S., Groeseneken, G.
Published in 1998 3rd International Symposium on Plasma Process-Induced Damage (Cat. No.98EX100) (1998)

by Cheung, K.P., Colonell, J.I., Steiner, K.G., Shive, S., Kook, T., Chang, C.-P., Lai, W.-Y.-C., Liu, C.-T., Liu, R., Pai, C.-S., Vaidya, H., Clemens, J.T.
Published in 1998 3rd International Symposium on Plasma Process-Induced Damage (Cat. No.98EX100) (1998)

by Harris, E.B., Gregor, R.W., Dennis, D.C., Lai, T.T., Sen, S., Yan, Y.F., Esry, T., Pita, M.
Published in 1998 3rd International Symposium on Plasma Process-Induced Damage (Cat. No.98EX100) (1998)

by Park, D., Kennard, M., Melaku, Y., Benjamin, N., King, T.-J., Hu, C.
Published in 1998 3rd International Symposium on Plasma Process-Induced Damage (Cat. No.98EX100) (1998)

by Hwang, G.S., Giapis, K.P.
Published in 1998 3rd International Symposium on Plasma Process-Induced Damage (Cat. No.98EX100) (1998)

by Kosaka, Y., Eriguchi, K., Yamada, T.
Published in 1998 3rd International Symposium on Plasma Process-Induced Damage (Cat. No.98EX100) (1998)

by Lee, Y.-H., Wu, K., Sery, G., Miekle, N., Lin, W.
Published in 1998 3rd International Symposium on Plasma Process-Induced Damage (Cat. No.98EX100) (1998)