Towards an understanding and control of cavitation activity in 1 MHz ultrasound fields
HAUPTMANN, M, STRUYF, H, MERTENS, P, HEYNS, M, DE GENDT, S, GLORIEUX, C, BREMS, S
Published in Ultrasonics sonochemistry (2013)
Published in Ultrasonics sonochemistry (2013)
Get full text
Journal Article
Enhancement of cavitation activity and particle removal with pulsed high frequency ultrasound and supersaturation
Hauptmann, M., Frederickx, F., Struyf, H., Mertens, P., Heyns, M., De Gendt, S., Glorieux, C., Brems, S.
Published in Ultrasonics sonochemistry (01.01.2013)
Published in Ultrasonics sonochemistry (01.01.2013)
Get full text
Journal Article
Time-resolved monitoring of cavitation activity in megasonic cleaning systems
Hauptmann, M, Brems, S, Struyf, H, Mertens, P, Heyns, M, De Gendt, S, Glorieux, C
Published in Review of scientific instruments (01.03.2012)
Published in Review of scientific instruments (01.03.2012)
Get more information
Journal Article
Leaching and drying marks on photoresist-coated substrates
Belmiloud, N., Tamaddon, A.H., Mertens, P.W., Struyf, H.
Published in Microelectronic engineering (01.02.2014)
Published in Microelectronic engineering (01.02.2014)
Get full text
Journal Article
Physical forces exerted by microbubbles on a surface in a traveling wave field
Brems, S., Hauptmann, M., Camerotto, E., Mertens, P.W., Heyns, M., Struyf, H., De Gendt, S.
Published in Ultrasonics (01.02.2014)
Published in Ultrasonics (01.02.2014)
Get full text
Journal Article
Si cap passivation for Ge nMOS applications
Sioncke, S., Vanherle, W., Art, W., Ceuppens, J., Ivanov, Ts, Lin, D., Nyns, L., Delabie, A., Conard, T., Struyf, H., De Gendt, S., Caymax, M., Collaert, N., Thean, A.
Published in Microelectronic engineering (01.09.2013)
Published in Microelectronic engineering (01.09.2013)
Get full text
Journal Article
Atomic layer deposition of Al2O3 on S-passivated Ge
SIONCKE, S, CEUPPENS, J, LIN, D, NYNS, L, DELABIE, A, STRUYF, H, DE GENDT, S, MÜLLER, M, BECKHOFF, B, CAYMAX, M
Published in Microelectronic engineering (01.07.2011)
Published in Microelectronic engineering (01.07.2011)
Get full text
Conference Proceeding
Journal Article
UV-induced modification of fluorocarbon for improvement of subsequent wet removal
Le, Q.T., Simms, I., Yue, H., Brown, I., Kesters, E., Vereecke, G., Struyf, H., De Gendt, S.
Published in Microelectronic engineering (01.02.2014)
Published in Microelectronic engineering (01.02.2014)
Get full text
Journal Article
An environment friendly wet strip process for 193 nm lithography patterning in BEOL applications
VEREECKE, G, KESTERS, E, LE, Q. T, CLAES, M, LUX, M, STRUYF, H, CARLEER, R, ADRIAENSENS, P
Published in Microelectronic engineering (01.05.2013)
Published in Microelectronic engineering (01.05.2013)
Get full text
Journal Article
High aspect ratio via etch development for Cu nails in 3-D-stacked ICs
Van Aelst, J., Struyf, H., Boullart, W., Vanhaelemeersch, S.
Published in Thin solid films (01.04.2008)
Published in Thin solid films (01.04.2008)
Get full text
Journal Article
Conference Proceeding
Integrated diffusion–recombination model for describing the logarithmic time dependence of plasma damage in porous low- k materials
Kunnen, E., Barkema, G.T., Maes, C., Shamiryan, D., Urbanowicz, A., Struyf, H., Baklanov, M.R.
Published in Microelectronic engineering (01.05.2011)
Published in Microelectronic engineering (01.05.2011)
Get full text
Journal Article
Conference Proceeding
Study on metrology of ERU tuning in TCP reactor, using PVx2 sensor wafer
Milenin, A P, de Marneffe, J F, Struyf, H, Boullart, W, Arleo, P
Published in 2010 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.07.2010)
Published in 2010 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.07.2010)
Get full text
Conference Proceeding
Selective ALD Mo Deposition in 10nm Contacts
van der Veen, Marleen H., Maes, J. W., Pedreira, O. Varela, Zhu, C., Tierno, D., Datta, S., Jourdan, N., Decoster, S., Wu, C., Mousa, M., Byun, Y., Struyf, H., Park, S., Tokei, Z.
Published in 2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM) (01.05.2023)
Published in 2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM) (01.05.2023)
Get full text
Conference Proceeding
Low Resistance Cu Vias for 24nm Pitch and Beyond
van der Veen, Marleen H., Pedreira, O. Varela, Jourdan, N., Park, S., Struyf, H., Tokei, Zs, Cerantes, C. Leal, Chen, F., Xie, X., Wu, Z., Jansen, A., Machillot, J., Cockburn, A.
Published in 2022 IEEE International Interconnect Technology Conference (IITC) (27.06.2022)
Published in 2022 IEEE International Interconnect Technology Conference (IITC) (27.06.2022)
Get full text
Conference Proceeding
Polymer dielectric treatment using ultraviolet-ozone: A photoelectron spectroscopy and ellipsometric porosimetry study
Toan Le, Quoc, Whelan, C. M., Struyf, H., Vanhaelemeersch, S., Azioune, A., Louette, P., Pireaux, J.-J., Maex, K.
Published in Journal of applied physics (01.10.2004)
Published in Journal of applied physics (01.10.2004)
Get full text
Journal Article
Process Optimization and Integration of Trimethylsilane-Deposited α-SiC:H and α-SiCO:H Dielectric Thin Films for Damascene Processing
Gray, W. D., Loboda, M. J., Bremmer, J. N., Struyf, H., Lepage, M., Van Hove, M., Donaton, R. A., Sleeckx, E., Stucchi, M., Lanckmans, F., Gao, T., Boullart, W., Coenegrachts, B., Maenhoudt, M., Vanhaelemeersch, S., Meynen, H., Maex, K.
Published in Journal of the Electrochemical Society (01.07.2003)
Published in Journal of the Electrochemical Society (01.07.2003)
Get full text
Journal Article
Exploring W-Cu hybrid dual damascene metallization for future nodes
van der Veen, Marleen H., Pedreira, O. Varela, Heylen, N., Jourdan, N., Lariviere, S., Park, S., Struyf, H., Tokei, Zs, Lei, W., Pethe, S., Hwang, S., Chen, F., Wu, Z., Machillot, J., Cockburn, A., Jansen, A.
Published in 2021 IEEE International Interconnect Technology Conference (IITC) (06.07.2021)
Published in 2021 IEEE International Interconnect Technology Conference (IITC) (06.07.2021)
Get full text
Conference Proceeding
Inflection points in interconnect research and trends for 2nm and beyond in order to solve the RC bottleneck
Tokei, Zs, Vega, V., Murdoch, G., O'Toole, M., Croes, K., Baert, R., Veen, M. Van der, Adelmann, C., Soulie, J. P., Boemmels, J., Wilson, C., Park, S. H., Sankaran, K., Pourtois, G., Sweerts, J., Paolillo, S., Decoster, S., Mao, M., Lazzarino, F., Versluijs, J., Blanco, V., Ercken, M., Kesters, E., Le, Q-T., Holsteyns, F., Heylen, N., Teugels, L., Devriendt, K., Struyf, H., Morin, P., Jourdan, N., Elshocht, S. Van, Ciofi, I., Gupta, A., Zahedmanesh, H., Vanstreels, K., Na, M. H.
Published in 2020 IEEE International Electron Devices Meeting (IEDM) (12.12.2020)
Published in 2020 IEEE International Electron Devices Meeting (IEDM) (12.12.2020)
Get full text
Conference Proceeding
Barrier/liner stacks for scaling the Cu interconnect metallization
van der Veen, Marleen H., Jourdan, N., Gonzalez, V. Vega, Wilson, C. J., Heylen, N., Pedreira, O. Varela, Struyf, H., Croes, K., Bommels, J., Tokei, Zs
Published in 2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC) (01.05.2016)
Published in 2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC) (01.05.2016)
Get full text
Conference Proceeding
Journal Article