Visualization and Numerical Simulation of Rarefied Gas Flow in Vertical Low-Pressure CVD Reactors for Thin Film Formation of Semiconductors
SASAKI, Takafumi, SAITO, Naoko, KIKUTA, Kazushige, CHIKAHISA, Takemi, HISHINUMA, Yukio, MORIMITSU, Kazuhiro
Published in Nihon Kikai Gakkai rombunshuu. B hen (2005)
Published in Nihon Kikai Gakkai rombunshuu. B hen (2005)
Get full text
Journal Article