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Fabrication of Through Micro-hole Arrays in Silicon Using Femtosecond Laser Irradiation and Selective Chemical Etching
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高博 陈涛 陈颖 司金海 侯洵
Published in
Chinese physics letters
(01.10.2015)
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Journal Article
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physics
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arrays
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chemical etching
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femtosecond
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irradiation
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laser arrays
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lasers
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English
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AUTh Library subscriptions: IOP Publishing
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