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Trajectory Tracking Control and Error Analysis of Three-Link Semiconductor Wafer Transfer Robot Arm Driven with Stepping Motors
ABE, Keiichi, KOJIMA, Hiroyuki, KUWANO, Yoshihumi, CHIGIRA, Hideyuki, KIKUCHI, Noriyoshi
Published in Transactions of the Japan Society of Mechanical Engineers Series C (2006)
Published in Transactions of the Japan Society of Mechanical Engineers Series C (2006)
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