Monte Carlo Simulation of Ionization Sputtering: 2nd Report, Consideration of Behavior of Cu Atoms and Ions on a Substrate Surface
YAMAZAKI, Osamu, TAKAGI, Shigeyuki, KINOSHITA, Kazuya, MASE, Koichi, YAHIRO, Kazuyuki, NANBU, Kenichi
Published in Transactions of the Japan Society of Mechanical Engineers Series B (25.01.2004)
Published in Transactions of the Japan Society of Mechanical Engineers Series B (25.01.2004)
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Journal Article
Monte Carlo Simulation of Ionization Sputtering: 1st Report, Reproduction of Shape of Buried Cu Films
YAMAZAKI, Osamu, TAKAGI, Shigeyuki, IYANAGI, Katsumi, KINOSHITA, Kazuya, MASE, Koichi, YAHIRO, Kazuyuki, NANBU, Kenichi
Published in Transactions of the Japan Society of Mechanical Engineers Series B (25.01.2004)
Published in Transactions of the Japan Society of Mechanical Engineers Series B (25.01.2004)
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Journal Article
Repairing of Cr-photo-mask by ultrafast- pulse laser
Kouta, Hikaru, Kondo, Yuki, Akagawa, Kazuyuki, Hirao, Kazuyuki, Sato, T., Nakjima, S., Toyoda, K., Hashidume, T., Minami, Y., Makino, K., Morimoto, J., Masagaki, A., Morirnoto, N., Mori, T., Hirobe, K., Iizuka, H., Murahara, M., Yosihara, S., Kawanaka, J., Kubodera, S., Kurosawa, K., Sasaki, W., Yanagita, H., Kawasaki, Y., Maezono, Y., Takezoe, N., Matsuno, H., Igarashi, T., Kobayashi, Shigeto, Ito, Masafumi, Goto, Toshio, Kamiiisaka, Jun, Nakamura, Masayuki, Nakajima, Yukio, Obara, T., Kubota, T., Mase, Y., Inoue, T., Suzuki, K., Nakata, J., Sugioka, K., Takai, H., Midorikawa, K., LIU, Zhengxin, WATANABE, Motoki, Nishio, Satoru, Sato, Hiroyasu, Tanaka, Kazuyoshi, Uchida, Yoshiyuki, Sasaki, K., Kawashima, T., Kadota, K., Shinto, Y., Hasegawa, M., Oyama, S., Ishii, Tadahiro, Sugirua, Masaru, NIINO, Hiroyuki, SATO, Tadatake, Tani, Masanao, Okuyama, Hiroko, Hayashi, Naoshige, Tomita, M., Hirayama, T., Ikagame, T., Ishii, M., SATOII, Saburoh, TANAKA, Tetukazu, ISHIMINE, Masashi, IHARA, Satoshi, YAMABE, Chobei, Sasaki, Takeshi, Zeng, Xiaoyang, Yoneda, Hitoki, Ueda, Kenichi, Yamamoto, Naokatsu, Ebata, Keiji, Shiozaki, Manabu, Fuse, Keiji, Shirakawa, Tsuguru, Hattori, Tetsuya, Akasaka, Nobuhiro, Semura, Shigeru, FUJII, Sadao, TAKAHASHI, Nobuyuki, YASUDA, Kozo, MURO, Mikio, Yamaguchi, Shigeru, Takasaki, Takuya, Takahashi, Kunimitsu, Nozaki, Shinnosuke, Qiu, Jianrong, Miura, K., Suzuki, T., Okutomi, Mamoru, Dahotre, N.B., Obara, Akira, Tsukamoto, Koichi, NAKATSUKA, Masahiro, Kumagai, K.
Published in Rēzā kenkyū (1999)
Published in Rēzā kenkyū (1999)
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