A signal processing method for the friction-based endpoint detection system of a CMP process
Xu, Chi (驰徐), Guo, Dongming (东明 郭), Jin, Zhuji (洙吉 金), Kang, Renke (仁科 康)
Published in Journal of semiconductors (01.12.2010)
Published in Journal of semiconductors (01.12.2010)
Get full text
Journal Article
Model analysis and experimental investigation of the friction torque during the CMP process
Guo, Dongming (东明 郭), Xu, Chi (驰徐), Kang, Renke (仁科 康), Jin, Zhuji (洙吉 金)
Published in Journal of semiconductors (01.03.2011)
Published in Journal of semiconductors (01.03.2011)
Get full text
Journal Article