Effects of external parameters on plasma characteristics and uniformity in a dual cylindrical inductively coupled plasma
WANG, Pengyu, XING, Siyu, HAN, Daoman, ZHANG, Yuru, LI, Yong, ZHOU, Cheng, GAO, Fei, WANG, Younian
Published in Plasma science & technology (01.12.2024)
Published in Plasma science & technology (01.12.2024)
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Experimental studies of H 2 /Ar plasma in a cylindrical inductive discharge with an expansion region
Li 李, Shi-Bo 世博, Xing 邢, Si-Yu 思雨, Gao 高, Fei 飞, Wang 王, You-Nian 友年
Published in Chinese physics B (01.09.2024)
Published in Chinese physics B (01.09.2024)
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