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The electrical properties of sulfur-implanted cubic boron nitride thin films
by
邓金祥 秦扬 孔乐 杨学良 李廷 赵卫平 杨萍
Published in
Chinese physics B
(01.04.2012)
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Journal Article
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physics
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Topic
activation energy
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annealing
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c-bn薄膜
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cubic boron nitride
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deposition
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electrical properties
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English
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IOP Science Platform
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