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Microwave annealing effects on ZnO films deposited by atomic layer deposition
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赵士瑞 董亚斌 于明岩 郭晓龙 徐昕伟 景玉鹏 夏洋
Published in
Journal of semiconductors
(01.11.2014)
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Journal Article
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engineering
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physics
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annealing
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deposition
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glass
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luminescence
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microwave
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microwaves
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IOP Electronic Journals
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