Showing
1 - 1
results of
1
Skip to content
Portal K.UTB
Čeština
Login
TBU Catalog
e-resources
E-THESES
All Fields
Title
Author
Subject
Find
Advanced Search
Search Results - "解婧 刘云飞 杨晋玲 唐龙娟 杨富华"
Showing
1 - 1
results of
1
Refine Results
Sort
Relevance
Date Descending
Date Ascending
1
Loading…
Stress and resistivity controls on in situ boron doped LPCVD polysilicon films for high-Q MEMS applications
by
解婧 刘云飞 杨晋玲 唐龙娟 杨富华
Published in
Journal of semiconductors
(01.08.2009)
Get full text
Journal Article
Save to List
Saved in:
RSS Feed
Email Search
Save Search
Search History
Back
Refine Results
Page will reload when a filter is selected or excluded.
Limit to articles from scholarly journals
Limit to articles with full text available
Limit to Open Access content
Exclude newspaper articles
Include articles at other libraries
Expand results using synonyms
Format
Journal Article
1 results
1
Subject Area
engineering
1 results
1
physics
1 results
1
Topic
annealing
1 results
1
film resistivity
1 results
1
low pressure chemical vapor deposition
1 results
1
mems谐振器
1 results
1
microelectromechanical systems
1 results
1
physical sciences
1 results
1
See more
Language
English
1 results
1
Year of Publication
From:
To:
Database
IOP Science Platform
1 results
1
