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光音響法を用いた熱伝導率を通しての半導体薄膜の特性評価
by
高畠, 信也
,
小林, 武
,
藤屋
,
正晴
,
和泉, 富雄
Published in
熱物性
(2003)
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physics
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crystallinity
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defect
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photoacoustic method
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thermal conductivity
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thin film
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Japanese
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