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Search Results - "蒋勐婷 刘玉岭 袁浩博 陈国栋 刘伟娟"
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Effect of novel alkaline copper slurry on 300 mm copper global planarization
by
刘伟娟 刘玉岭
王辰
伟 陈国栋 蒋勐婷 袁浩博
程鹏飞
Published in
Journal of semiconductors
(01.09.2014)
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Effect of H2O2 and nonionic surfactant in alkaline copper slurry
by
袁浩博 刘玉岭 蒋勐婷 陈国栋 刘伟娟
王胜利
Published in
半导体学报:英文版
(2015)
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Evaluation of planarization performance for a novel alkaline copper slurry under a low abrasive concentration
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蒋勐婷 刘玉岭 袁浩博 陈国栋 刘伟娟
Published in
Journal of semiconductors
(01.11.2014)
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Effect of chelating agent concentration in alkaline Cu CMP process under the condition of different applied pressures
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袁浩博 刘玉岭 蒋勐婷 刘伟娟 陈国栋
Published in
Journal of semiconductors
(01.11.2014)
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Stability for a novel low-pH alkaline slurry during the copper chemical mechanical planarization
by
陈国栋 刘玉岭
王辰
伟 刘伟娟 蒋勐婷 袁浩博
Published in
Journal of semiconductors
(01.08.2014)
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engineering
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physics
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physical sciences
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physics
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physics, condensed matter
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science & technology
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copper
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planarization
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