Study on Nano-machining Process Using Mechanism of a Friction Force Microscope : 2nd Report, The Characteristics of Nano-Machining Process Using the Newly Developed FFM System
ASHIDA, Kiwamu, MORITA, Noboru, YOSHIDA, Yoshitaro
Published in Transactions of the Japan Society of Mechanical Engineers Series C (25.10.1998)
Published in Transactions of the Japan Society of Mechanical Engineers Series C (25.10.1998)
Get full text
Journal Article
Study on Nano-machining Process Using Mechanism of a Friction Force Microscope : 1st Report, Trial Production of Nano-machining and Measurement System Modified a FFM
ASHIDA, Kiwamu, MORITA, Noboru, YOSHIDA, Yoshitaro
Published in Transactions of the Japan Society of Mechanical Engineers Series C (25.10.1998)
Published in Transactions of the Japan Society of Mechanical Engineers Series C (25.10.1998)
Get full text
Journal Article