Scratching by pad asperities in copper electrochemical-mechanical polishing
Bian, Yan-fei, Zhai, Wen-jie, Cheng, Yuan-yuan, Zhu, Bao-quan
Published in Journal of Central South University (01.11.2014)
Published in Journal of Central South University (01.11.2014)
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Journal Article
Electrolyte composition and removal mechanism of Cu electrochemical mechanical polishing
Bian, Yan-fei, Zhai, Wen-jie, Cheng, Yuan-yuan, Zhu, Bao-quan, Wang, Jin-hu
Published in Journal of Central South University (01.06.2014)
Published in Journal of Central South University (01.06.2014)
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Journal Article