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Method for forming InN film on SiC substrate
XU LIANG, ZHAN JUNJIE, YANG MINGYI, CHEN SUCHUN, MENG XIUQING, YU YAJUN
Year of Publication 20.05.2022
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Year of Publication 20.05.2022
Patent
Preparation method of fluorine-containing carbon film based on electron cyclotron resonance plasma
YANG MINGSHUN, GUO MEILING, XU CHAOYUAN, LI PENGYANG, LI YAN, YANG ZHENCHAO
Year of Publication 26.04.2024
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Year of Publication 26.04.2024
Patent