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Growth and microstructure properties of microcrystalline silicon films deposited using jet-ICPCVD
Zuo, Zewen (则文 左), Guan, Wentian (文田 管), Xin, Yu (煜辛), Lu, Jin (锦闾), Wang, Junzhuan (军转 王), Pu, Lin (林濮), Shi, Yi (毅施), Zheng, Youdou (有炓 郑)
Published in Journal of semiconductors (01.03.2011)
Published in Journal of semiconductors (01.03.2011)
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