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Saturation Ion Current Densities in Inductively Coupled Hydrogen Plasma Produced by Large-Power Radio Frequency Generator
by
王松柏 雷光玖 毕振华 杨思泽 刘东平 H
.
GHOMI
Published in
Plasma science & technology
(01.09.2016)
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physics
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icp
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ion
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large-power rf generator
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outer/inner puffing gas pressure ratio
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English
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Institute of Physics (IOP) Publishing Journals
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