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Enhanced Depth of Lift-off Pattern Defined with Soft Mold Ultraviolet Nanoimprint by Multi-Layer Masks
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王智浩 刘文 左强 王磊 赵彦立 徐智谋
Published in
Chinese physics letters
(01.08.2014)
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Journal Article
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physics
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Topic
diffusion
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masks
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molds
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multilayers
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nanostructure
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photonic crystals
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English
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IOP Science Platform
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