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Effect of power variation on microstructure and surface morphology of HgCdTe films deposited by RF magnetron sputtering
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王光华 孔金丞 李雄军 邱锋 李悰 杨丽丽 孔令德 姬荣斌
Published in
Journal of semiconductors
(01.05.2010)
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Journal Article
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engineering
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physics
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afm分析
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growth rate
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hgcdte films
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microstructure
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physical sciences
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physics
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English
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IOPscience platform
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