Fabrication of highly-oriented β-Ga2O3 thin film on ZnO/AlOx-buffered cyclo-olefin polymer substrate by excimer laser annealing at room temperature
Ryoya Kai, Oga, Tomoaki, Watanabe, Kazuki, Kaneko, Satoru, Matsuda, Akifumi, Yoshimoto, Mamoru
Published in Japanese Journal of Applied Physics (01.04.2023)
Published in Japanese Journal of Applied Physics (01.04.2023)
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