Flattening of Si (001) Surface by EEM (Elastic Emission Machining): Atomic Structure Identification of Processed Surface
YAMAUCHI, Kazuto, MIMURA, Hidekazu, KUBOTA, Akihisa, ARIMA, Kenta, INAGAKI, Kouji, ENDO, Katsuyoshi, MORI, Yuzo
Published in Journal of the Japan Society for Precision Engineering, Contributed Papers (05.04.2004)
Published in Journal of the Japan Society for Precision Engineering, Contributed Papers (05.04.2004)
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Journal Article
The Influence of Particle Morphology on the Si(001) Surface in EEM (Elastic Emission Machining)
KUBOTA, Akihisa, MIMURA, Hidekazu, INAGAKI, Kouji, MORI, Yuzo, YAMAUCHI, Kazuto
Published in Journal of the Japan Society for Precision Engineering, Contributed Papers (2005)
Published in Journal of the Japan Society for Precision Engineering, Contributed Papers (2005)
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Journal Article
Effect of Silane Concentration on Structure of the Poly-Si Films Prepared at High Rates by Atmospheric Pressure Plasma CVD
OHMI, Hiromasa, KAKIUCHI, Hiroaki, NAKAHAMA, Yasuji, EBATA, Yusuke, YASUTAKE, Kiyoshi, YOSHII, Kumayasu, MORI, Yuzo
Published in Journal of the Japan Society for Precision Engineering, Contributed Papers (2005)
Published in Journal of the Japan Society for Precision Engineering, Contributed Papers (2005)
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Journal Article
Deposition Characteristics of SiNx Films by Atmospheric Pressure Plasma CVD
MORI, Yuzo, KAKIUCHI, Hiroaki, OHMI, Hiromasa, YOSHII, Kumayasu, YASUTAKE, Kiyoshi, NAKAHAMA, Yasuji
Published in Journal of the Japan Society for Precision Engineering, Contributed Papers (2004)
Published in Journal of the Japan Society for Precision Engineering, Contributed Papers (2004)
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Journal Article
Fabrication of Ultraprecisely Figured Elliptical Mirror for Nano-Focusing of Hard X-ray and Evaluation of Focusing Properties
YUMOTO, Hirokatsu, MIMURA, Hidekazu, MATSUYAMA, Satoshi, HARA, Hideyuki, YAMAMURA, Kazuya, SANO, Yasuhisa, UENO, Kazumasa, ENDO, Katsuyoshi, MORI, Yuzo, NISHINO, Yoshinori, TAMASAKU, Kenji, YABASHI, Makina, ISHIKAWA, Tetsuya, YAMAUCHI, Kazuto
Published in Journal of the Japan Society for Precision Engineering, Contributed Papers (2005)
Published in Journal of the Japan Society for Precision Engineering, Contributed Papers (2005)
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Journal Article
Correlation between Performances of the a-Si Solar Cells and Properties of the i-Layers Deposited at Extremely High Rates by Atmospheric Pressure Plasma CVD
MORI, Yuzo, KAKIUCHI, Hiroaki, YOSHII, Kumayasu, YASUTAKE, Kiyoshi, OHMI, Hiromasa, EBATA, Yusuke, NAKAMURA, Tsuneo, TAKEUCHI, Hiroaki, HOJO, Yoshiyuki, FURUKAWA, Kazuhiko
Published in Journal of the Japan Society for Precision Engineering, Contributed Papers (2004)
Published in Journal of the Japan Society for Precision Engineering, Contributed Papers (2004)
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Journal Article