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雾化辅助化学气相沉积法氧化镓薄膜生长研究
by
罗月婷
,
肖黎
,
陈远豪
,
梁昌兴
,
龚恒翔
Published in
人工晶体学报
(01.07.2022)
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engineering
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atomization-assisted chemical vapor deposition
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deposition temperature
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differential pressure
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