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Effects of NH3 annealing on interface and electrical properties of Gd-doped HfO2/Si stack
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杨萌萌 屠海令 杜军 魏峰 熊玉华 赵鸿斌
Published in
Journal of rare earths
(01.04.2013)
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Journal Article
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chemistry
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annealing
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chemistry
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chemistry, applied
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density
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electrical properties
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gd-doped hfo2
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ScienceDirect Freedom Collection 2013
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