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Finite element analysis of the temperature field in a vertical MOCVD reactor by induction heating
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李志明 许晟瑞 张进成 常永明 倪金玉 周小伟 郝跃
Published in
Journal of semiconductors
(01.11.2009)
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Journal Article
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engineering
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physics
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finite element
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mocvd
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physical sciences
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physics
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physics, condensed matter
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science & technology
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English
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AUTh Library subscriptions: IOP Publishing
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