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Search Results - "张涵 李伟华"
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A novel compensation method for polygonized mesa structures on（100） silicon substrate
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张涵 李伟华
Published in
Journal of semiconductors
(2010)
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A novel method for generating a rectangular convex corner compensation structure in an anisotropic etching process
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张涵 李伟华
Published in
Journal of semiconductors
(01.07.2009)
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engineering
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physics
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各向异性
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硅衬底
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anisotropic etching
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