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Epitaxial growth and characterization of Gd2O3-doped HfO2 film on Ge （001） substrates with zero interface layer
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张心强 屠海令 魏峰 熊玉华 杨萌萌 赵洪滨 王文武 杜军
Published in
中国稀土学报：英文版
(2013)
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Journal Article
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chemistry
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二氧化铪
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反射高能电子衍射
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基板
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等效氧化层厚度
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薄膜外延生长
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