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２種混合砥粒研磨法を用いたガラス基板研磨加工による表面粗さ改善速度の向上
by
嶽野
,
広明
,
野老山, 貴行
,
村島, 基之
,
梅原, 徳次
,
千葉, 翔悟
Published in
砥粒加工学会誌
(01.08.2020)
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Journal Article
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engineering
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abrasive
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arithmetic mean roughness
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polishing
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surface roughness
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two mixed abrasive slurry
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Japanese
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