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单晶金刚石异质外延用铱复合衬底研究现状
by
屈鹏霏
,
金鹏
,
周广迪
,
王镇
,
许敦洲
,
吴巨
,
郑红军
,
王占国
Published in
人工晶体学报
(01.05.2023)
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engineering
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bias-enhanced nucleation
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diamond
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heteroepitaxy
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iridium-based composite substrate
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microwave plasma chemical vapor deposition
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semiconductor
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