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2-D nano-positioning system for AFM based on H∞ control
by
孙鑫 金小平 程传东 唐沈键
Published in
Journal of Shanghai University
(01.10.2010)
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Journal Article
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engineering
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sciences (general)
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afm
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atomic force microscope
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classical mechanics
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control
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engineering
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environment
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English
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SpringerLink Journals (ICM)
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