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Fabrication of Al/AlOx/Al Josephson junctions and superconducting quantum circuits by shadow evaporation and a dynamic oxidation process

Fabrication of Al/AlOx/Al Josephson junctions and superconducting quantum circuits by shadow evaporation and a dynamic oxidation process

by 吴玉林邓辉于海峰薛光明田野李洁陈莺飞赵士平郑东宁
Published in 中国物理B：英文版 (01.06.2013)

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Journal Article