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"吉冨, 健一郎"
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"吉冨, 健一郎"
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エアパルス式ディスペンサを用いた描画システムによる微細パターン形成
by
吉冨
,
健一郎
,
宇根, 篤暢
,
餅田, 正秋
Published in
砥粒加工学会誌
(01.05.2012)
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小形工具による大口径ウエハの形状修正研磨: 第2報:ポリシャ平坦度の加工精度への影響とポリシャ劣化の抑制
by
吉冨
,
健一郎
,
宇根, 篤暢
,
餅田, 正秋
Published in
砥粒加工学会誌
(01.02.2009)
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揺動速度制御による石英ウエハの高平坦化研磨
by
宇根, 篤暢
,
吉冨
,
健一郎
,
餅田, 正秋
Published in
砥粒加工学会誌
(2007)
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ブラスト加工によるポーラス材上へのピン形成
by
宇根, 篤暢
,
吉冨
,
健一郎
,
餅田, 正秋
Published in
砥粒加工学会誌
(2005)
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高さ調節可能なリテーナ機構を用いた新揺動研磨法
by
宇根, 篤暢
,
吉冨
,
健一郎
,
餅田, 正秋
,
千賀, 達也
,
新城, 啓慎
Published in
砥粒加工学会誌
(2005)
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小形工具による揺動速度制御研磨加工 (第3報): はみ出し加工時における圧力分布と形状
by
宇根, 篤暢
,
吉冨
,
健一郎
,
餅田, 正秋
Published in
精密工学会誌論文集
(2004)
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揺動速度制御型連続研削・研磨装置の開発(第2報): 研削による軸対称形状創成と揺動速度制御研磨による形状修正
by
宇根, 篤暢
,
杉浦, 秀樹
,
吉冨
,
健一郎
,
餅田, 正秋
Published in
精密工学会誌論文集
(05.08.2004)
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