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Search Results - "刘秀娟 张燕 李向阳"
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利用ICPCVD方法在GaN上沉积氧化硅薄膜的特性
by
刘秀娟 张燕 李向阳
Published in
红外与毫米波学报
(2015)
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Journal Article
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applied sciences
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icp-cvd
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