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Determination of Plasma Parameters in a Dual-Frequency Capacitively Coupled CF4 Plasma Using Optical Emission Spectroscopy
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刘文耀 朱爱民 李小松 赵国利 陆文琪 徐勇 王友年
Published in
等离子体科学和技术：英文版
(01.09.2013)
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Journal Article
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physics
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cf4
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physical sciences
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physics
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physics, fluids & plasmas
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science & technology
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English
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IOP Electronic Journals
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