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Search Results - "刘忠伟 李森 陈强 杨丽珍 王正铎"
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Measurement of the O2 Dissociation Fraction in RF Low Pressure O2/Ar Plasma Using Optical Emission Spectrometry
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刘忠伟 李森 陈强 杨丽珍 王正铎
Published in
Plasma science & technology
(01.08.2011)
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Journal Article
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physics
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actinometry
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ar plasma
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optical emission spectroscopy
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rf o
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低压
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光谱测量
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English
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IOP Science Platform
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