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晶体锗掺硼的离子注入工艺与晶格损伤机理研究
by
HABIBA Um E
,
陈天业
,
刘赤县
,
窦伟
,
刘晓燕
,
凌静威
,
潘昌翊
,
王鹏
,
邓惠勇
,
沈宏
,
戴宁
Published in
红外与毫米波学报
(2024)
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applied sciences
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Chinese
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