Cleaning of two mirrors in the first mirror unit using radiofrequency capacitively coupled plasma
WANG, Chenxue, YAN, Rong, LIU, Yuming, XU, Su, MU, Lei, ZHENG, Wei, DING, Rui, CHEN, Junling
Published in Plasma science & technology (01.09.2024)
Published in Plasma science & technology (01.09.2024)
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