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Selective hot atomic layer etch
PILSTEIN ROBERT, WU NOEL M, LEHN JEAN-SEBASTIEN, MCBRIARTY, MARK, E, MCWILLIAMS JEFFREY L, KANJOLIA, RAVI
Year of Publication 31.05.2024
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Year of Publication 31.05.2024
Patent
Atomic layer etching of metals using co-reactants as halogenating agents
DEZELACHER CHRISTOPH, XIE WENYI, MUMPL MARKUS, SALAIS HENRI, MCBRIARTY MARK, WOODRUFF JOHN, KANJOLIA, RAVI, PARSONS GREGORY
Year of Publication 13.09.2024
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Year of Publication 13.09.2024
Patent
할로겐화제로서 공반응물을 이용하는 금속의 원자층 에칭
WOODRUFF JACOB, XIE WENYI, SAARE HOLGER, MOINPOUR MANSOUR, DEZELAH CHARLES, KANJOLIA RAVINDRA, PARSONS GREGORY, MCBRIARTY MARTIN
Year of Publication 24.10.2024
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Year of Publication 24.10.2024
Patent