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Impact of Underlying Insulators on the Crystallinity and Antisite Defect Formation in PVD-MoS2 Films
Matsunaga, Naoki, Imai, Shinya, Shirokura, Takanori, Mochizuki, Yasuhide, Kuwahata, Kazuaki, Tsutsui, Kazuo, Kakushima, Kuniyuki, Wakabayashi, Hitoshi
Published in IEEE journal of the Electron Devices Society (01.01.2025)
Published in IEEE journal of the Electron Devices Society (01.01.2025)
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Journal Article
High quality PVD-MoS2 film on plasma-ALD-SiO2 underlaying material for CFET integration
Matsunaga, Naoki, Imai, Shinya, Shirokura, Takanori, Tsutsui, Kazuo, Kakushima, Kuniyuki, Wakabayashi, Hitoshi
Published in 2024 8th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) (03.03.2024)
Published in 2024 8th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) (03.03.2024)
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Conference Proceeding
Grain-Size Enlargement of MoS2 Film by Low-Rate Sputtering with Molybdenum Grid
Imai, Shinya, Ono, Ryo, Muneta, Iriya, Kakushima, Kuniyuki, Tatsumi, Tetsuya
Published in 2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) (07.03.2023)
Published in 2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) (07.03.2023)
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Conference Proceeding
Improvement of MoS2 Film Quality by Solid-Phase Crystallization from PVD Amorphous MoSx Film
Ono, Ryo, Imai, Shinya, Kawanago, Takamasa, Muneta, Iriya, Kakushima, Kuniyuki, Tsutsui, Kazuo, Tatsumi, Tetsuya, Tomiya, Shigetaka, Wakabayashi, Hitoshi
Published in 2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) (07.03.2023)
Published in 2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) (07.03.2023)
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Conference Proceeding