Showing
1 - 1
results of
1
for search '
"严利均"
'
Skip to content
Portal K.UTB
Čeština
Login
TBU Catalog
e-resources
E-THESES
All Fields
Title
Author
Subject
Find
Advanced Search
Search Results - "严利均"
Showing
1 - 1
results of
1
for search '
"严利均"
'
, query time: 0.46s
Refine Results
Sort
Relevance
Date Descending
Date Ascending
1
Loading…
等离子体刻蚀中边缘离子轨迹的控制与优化
by
李国荣
,
赵馗
,
严利均
,
Hiroshi Iizuka
,
刘身健
,
倪图强
,
张兴
Published in
北京大学学报(自然科学版)
(20.11.2019)
Get full text
Journal Article
Save to List
Saved in:
RSS Feed
Email Search
Save Search
Search History
Back
Refine Results
Page will reload when a filter is selected or excluded.
Limit to articles from scholarly journals
Limit to articles with full text available
Limit to Open Access content
Exclude newspaper articles
Include articles at other libraries
Expand results using synonyms
Format
Journal Article
1 results
1
Subject Area
sciences (general)
1 results
1
Topic
3d nand
1 results
1
edge impedance
1 results
1
etching uniformity
1 results
1
ion movement trajectory
1 results
1
plasma etching
1 results
1
Language
Chinese
1 results
1
Year of Publication
From:
To:
Database
ProQuest Central
1 results
1
East & South Asia Database
1 results
1