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窒素ガス用DLC膜適応メカニカルシールの使用可能条件
by
岡, 昌男
,
上村
,
訓右
,
足立, 幸志
Published in
日本機械学会論文集
(2017)
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Journal Article
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engineering
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dlc films
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mechanical seals
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operating condition
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wear mode
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μ2pv value
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Japanese
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