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Repairing of Cr-photo-mask by ultrafast- pulse laser

by Kouta, Hikaru, Kondo, Yuki, Akagawa, Kazuyuki, Hirao, Kazuyuki, Sato, T., Nakjima, S., Toyoda, K., Hashidume, T., Minami, Y., Makino, K., Morimoto, J., Masagaki, A., Morirnoto, N., Mori, T., Hirobe, K., Iizuka, H., Murahara, M., Yosihara, S., Kawanaka, J., Kubodera, S., Kurosawa, K., Sasaki, W., Yanagita, H., Kawasaki, Y., Maezono, Y., Takezoe, N., Matsuno, H., Igarashi, T., Kobayashi, Shigeto, Ito, Masafumi, Goto, Toshio, Kamiiisaka, Jun, Nakamura, Masayuki, Nakajima, Yukio, Obara, T., Kubota, T., Mase, Y., Inoue, T., Suzuki, K., Nakata, J., Sugioka, K., Takai, H., Midorikawa, K., LIU, Zhengxin, WATANABE, Motoki, Nishio, Satoru, Sato, Hiroyasu, Tanaka, Kazuyoshi, Uchida, Yoshiyuki, Sasaki, K., Kawashima, T., Kadota, K., Shinto, Y., Hasegawa, M., Oyama, S., Ishii, Tadahiro, Sugirua, Masaru, NIINO, Hiroyuki, SATO, Tadatake, Tani, Masanao, Okuyama, Hiroko, Hayashi, Naoshige, Tomita, M., Hirayama, T., Ikagame, T., Ishii, M., SATOII, Saburoh, TANAKA, Tetukazu, ISHIMINE, Masashi, IHARA, Satoshi, YAMABE, Chobei, Sasaki, Takeshi, Zeng, Xiaoyang, Yoneda, Hitoki, Ueda, Kenichi, Yamamoto, Naokatsu, Ebata, Keiji, Shiozaki, Manabu, Fuse, Keiji, Shirakawa, Tsuguru, Hattori, Tetsuya, Akasaka, Nobuhiro, Semura, Shigeru, FUJII, Sadao, TAKAHASHI, Nobuyuki, YASUDA, Kozo, MURO, Mikio, Yamaguchi, Shigeru, Takasaki, Takuya, Takahashi, Kunimitsu, Nozaki, Shinnosuke, Qiu, Jianrong, Miura, K., Suzuki, T., Okutomi, Mamoru, Dahotre, N.B., Obara, Akira, Tsukamoto, Koichi, NAKATSUKA, Masahiro, Kumagai, K.
Published in Rēzā kenkyū (1999)

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