Achievement of Highly Flat Edge with Double-Layered Polishing Pad (Improvement of Edge Flatness with Softening Upper Layer)
SATAKE, Urara, ENOMOTO, Toshiyuki, MIYAKE, Takahiro, TABATA, Norikazu
Published in TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C (2012)
Published in TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C (2012)
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