Preparation and characterization of multilayer metallization structures with titanium nitride and titanium silicide
Panjan, P, Navinšek, B, Žabkar, A, Mandrino, D, Godec, M, Koželj, M, Krivokapič, Z, Zalar, A
Published in Thin solid films (10.12.1989)
Published in Thin solid films (10.12.1989)
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Journal Article
Conference Proceeding
Optical properties of nitride coatings deposited at low substrate temperatures
Panjan, P, Žabkar, A, Navinšek, B, Demšar, A, Švajger, A, Tanović, L, Tanović, N
Published in Vacuum (1990)
Published in Vacuum (1990)
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Journal Article
Structural analysis of ZrN and TiN films prepared by reactive plasma beam deposition
Panjan, P., Navinšek, B., Žabkar, A., Marinković, V., Mandrino, Dj, Fišer, J.
Published in Thin solid films (01.01.1993)
Published in Thin solid films (01.01.1993)
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Journal Article
Conference Proceeding
TiSi2 formation during annealing of sputtered Ti, Ti/TiN and TiNx thin films
Panjan, P, Navinšek, B, Žabkar, A, Godec, M, Krivokapić, Z, Zalar, A, Praček, B
Published in Vacuum (01.01.1990)
Published in Vacuum (01.01.1990)
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Journal Article
Characterization of multilayer structures with titanium nitride and titanium silicide
Panjan, P., Žabkar, A., Navinšek, B., Kraševec, V., Marinković, V., Mandrino, Dj, Godec, M., Maček, M., Zalar, A.
Published in Vacuum (1990)
Published in Vacuum (1990)
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Journal Article
Conference Proceeding
TiSi 2 formation during annealing of sputtered Ti, Ti/TiN and TiN x thin films
Panjan, P, Navinšek, B, Žabkar, A, Godec, M, Krivokapić, Z, Zalar, A, Praček, B
Published in Vacuum (1990)
Published in Vacuum (1990)
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Journal Article
Blistering and deuterium trapping induced by D + ion bombardment ES metal alloys
Navinšek, B., Peternel, M., Žabkar, A., Erents, S.K.
Published in Journal of nuclear materials (1980)
Published in Journal of nuclear materials (1980)
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Journal Article